Abstract:The NiCr micro-heater is a key element of MEMS-based electro-explosive device (mEED), while electrostatic discharge (ESD) may excite the micro-heater accidentally. To discover mechanism that how the ESD excitations effect on heat response performance of NiCr micro-heater, electro-thermal conversion process was numerically modelled by using commercial software. Three different shapes of micro-heaters, including rectangular, V-shape and square ones, are designed, and a series of simulation models are built under… Show more
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