Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures

Ramamurthi, Badri; Economou, Demetre J.; Kaganovich, Igor

doi:10.1088/0963-0252/12/3/302

Cited by 28 publications

(22 citation statements)

References 42 publications

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“…The nonlocal conductivity, and plasma density profiles and EEDF are all nonlinear and nonlocally coupled [39]. Hence, for accurate calculation of the discharge characteristics at low pressures, the EEDF needs to be computed selfconsistently [41][42][43][44]. The effects of a nonMaxwellian EEDF, nonlinear phenomena, the effects of plasma non-uniformity and finite size,as well as influence of the external magnetic field on the anomalous skin effect will be reported in the second part of the review [45].…”

Section: Discussionmentioning

confidence: 99%

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Kaganovich

Polomarov

Theodosiou

2005

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Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer.Electrons can transport the plasma current away from the skin layer due to their thermal motion.As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma.

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Section: Discussionmentioning

confidence: 99%

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Kaganovich

Polomarov

Theodosiou

2005

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“…[3] that the total electron heating at the discharge center is smaller than the Ohmic heating. It can arise from the nonlocal behavior of the electrons since the conductivity in the nonlocal regime has the different form with the classical conductivity [17]. It is therefore concluded that the EDF evolution while changing the low-frequency current is attributed to the transition from collisional to collisionless property of the lowenergy electrons.…”

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confidence: 96%

Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges

2004

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The mode transition induced by varying the low-frequency current in low-pressure dual-frequency discharges in argon is found through particle-in-cell or Monte Carlo simulations. As the low-frequency (2 MHz) current increases for the fixed high-frequency (27 MHz) current, the electron distribution function (EDF) changes from Druyvesteyn to bi-Maxwellian (in alpha mode) or Maxwellian-type (in gamma mode), along with the significant drop in the effective electron temperature. It is shown that this EDF evolution is attributed to the transition from collisional to collisionless property (but not stochastic heating) of the low-energy electrons as well as the alpha-gamma transition.

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“…Although some rigorous analytical results of non-uniform plasmas have been reported, the detailed selfconsistent, nonlocal simulations related to such plasmas and comparison with experimental data are still lacking. Self-consistent, nonlocal simulations based on the approach developed in this paper were completed recently and presented in our separate publications [62,63] and will be additionally reported in Ref. [64].…”

Section: Self-consistent System Of Equations For a Kinetic Descrimentioning

confidence: 99%

Landau damping and anomalous skin effect in low-pressure gas discharges: Self-consistent treatment of collisionless heating

2004

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In low-pressure discharges, where the electron mean free path is larger or comparable with the discharge length, the electron dynamics is essentially nonlocal. Moreover, the electron energy distribution function (EEDF) deviates considerably from a Maxwellian. Therefore, an accurate kinetic description of the low-pressure discharges requires knowledge of the nonlocal conductivity operator and calculation of the non-Maxwellian EEDF. The previous treatments made use of simplifying assumptions: a uniform density profile and a Maxwellian EEDF. In the present study a self-consistent system of equations for the kinetic description of nonlocal, nonuniform, nearly collisionless plasmas of low-pressure discharges is reported. It consists of the nonlocal conductivity operator and the averaged kinetic equation for calculation of the non-Maxwellian EEDF. This system was applied to the calculation of collisionless heating in capacitively and inductively coupled plasmas. In particular, the importance of accounting for the nonuniform plasma density profile for computing the current density profile and the EEDF is demonstrated. The enhancement of collisionless heating due to the bounce resonance between the electron motion in the potential well and the external rf electric field is investigated. It is shown that a nonlinear and self-consistent treatment is necessary for the correct description of collisionless heating.

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Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures

Cited by 28 publications

References 42 publications

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges

Landau damping and anomalous skin effect in low-pressure gas discharges: Self-consistent treatment of collisionless heating

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