Effect of electrical properties on thermal diffusivity of amorphous indium zinc oxide films

Ashida, Toru; Miyamura, Amica; Satô, Yasushi; Yagi, Takashi; Taketoshi, Naoyuki; Baba, Toshihide; Shigesato, Yuzo

doi:10.1116/1.2743644

Cited by 36 publications

(15 citation statements)

References 13 publications

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“…We already reported the thermal conductivities of amorphous transparent conductive oxide (TCO) films such as amorphous indium-zinc-oxide (a-IZO) films. 10) The thermal conductivity of degenerate a-IZO films is linearly proportional to the electrical conductivity. Carrier transport in a-IGZO is governed by percolation conduction via the overlapping outer s orbitals (i.e., conduction band) of In 4þ and randomly distributed Ga 3þ and Zn 2þ ions.…”

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“…The data for a-IZO films reported by Ashida et al are also plotted in this figure. 10) As the carrier density becomes smaller than 10 18 cm À3 , TCO films become from a nearly degenerate state to a non-degenerate state. In this region, the thermal conductivities of the a-IGZO films show a constant value of 1.4 WÁm À1 ÁK À1 .…”

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confidence: 99%

“…Ashida et al reported the ph values of crystal ITO (c-ITO) 19) and a-IZO films. 10) The ph of an amorphous ITO (a-ITO) film is obtained from Ref. 13.…”

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“…3. Thermal conductivities of a-IGZO and a-IZO 10) films as a function of carrier density. A red dashed curve represents estimated thermal conductivity of a-IGZO film derived from sum of the contributions of phonons ( ph ) and electrons ( el ).…”

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Thermal Conductivity of Amorphous Indium–Gallium–Zinc Oxide Thin Films

Yoshikawa

Yagi

Oka

et al. 2013

Appl. Phys. Express

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We investigated the thermal conductivity of 200-nm-thick amorphous indium–gallium–zinc-oxide (a-IGZO) films. Films with a chemical composition of In:Ga:Zn= 1:1:0.6 were prepared by dc magnetron sputtering using an IGZO ceramic target and an Ar–O2 sputtering gas. The carrier density of the films was systematically controlled from 1014 to >1019 cm-3 by varying the O2 flow ratio. Their Hall mobility was slightly higher than 10 cm2·V-1·s-1. Those films were sandwiched between 100-nm-thick Mo layers; their thermal diffusivity, measured by a pulsed light heating thermoreflectance technique, was ∼5.4×10-7 m2·s-1 and was almost independent of the carrier density. The average thermal conductivity was 1.4 W·m-1·K-1.

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confidence: 99%

“…Ashida et al reported the ph values of crystal ITO (c-ITO) 19) and a-IZO films. 10) The ph of an amorphous ITO (a-ITO) film is obtained from Ref. 13.…”

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confidence: 99%

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confidence: 99%

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Thermal Conductivity of Amorphous Indium–Gallium–Zinc Oxide Thin Films

Yoshikawa

Yagi

Oka

et al. 2013

Appl. Phys. Express

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“…For example, the thermal diffusivities of Sn-doped In 2 , respectively, and are proportional to the electrical conductivities. 12,13 However, comparable data for ATO and TTO thin films, both of which are key materials for optoelectronic applications, have not yet been reported. Generally speaking, thermal energy in materials is transported mainly by free electrons and phonons.…”

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confidence: 99%