2022
DOI: 10.3390/ma15196922
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Effect of Drilling Parameters on Machining Performance in Drilling Polytetrafluoroethylene

Abstract: Polytetrafluoroethylene (PTFE) plays an important role in semiconductor manufacturing. It is an important processing material for the key sealing components in the field of immersion lithography. The lack of research related to the mechanical processing of PTFE leads to many challenges in producing complex parts. This paper conducted a drilling experiment on PTFE. The effect of cutting parameters on the drilling performance was investigated. Thrust, torque, surface roughness, and drilling temperature were used… Show more

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Cited by 4 publications
(4 citation statements)
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“…This forms good chips and reduces the coefficient of friction betw chips and the front tool face, resulting in a reduction in the drilling force. Second chip formation is beneficial in reducing the roughness of the hole wall; a lower roughness of the hole wall reduces the frictional force on the guiding part of the d which serves to reduce the drilling force [25]. Furthermore, the reduction in friction This analysis reveals that to reduce the drilling force and avoid undesirable problems (such as low processing accuracy of the hole and high surface roughness due to drill-lead deflection and workpiece vibration), the feed rate should be as low as possible.…”
Section: Effect Of Drilling Speed On the Drilling Force And Hole Diam...mentioning
confidence: 99%
See 1 more Smart Citation
“…This forms good chips and reduces the coefficient of friction betw chips and the front tool face, resulting in a reduction in the drilling force. Second chip formation is beneficial in reducing the roughness of the hole wall; a lower roughness of the hole wall reduces the frictional force on the guiding part of the d which serves to reduce the drilling force [25]. Furthermore, the reduction in friction This analysis reveals that to reduce the drilling force and avoid undesirable problems (such as low processing accuracy of the hole and high surface roughness due to drill-lead deflection and workpiece vibration), the feed rate should be as low as possible.…”
Section: Effect Of Drilling Speed On the Drilling Force And Hole Diam...mentioning
confidence: 99%
“…This forms good chips and reduces the coefficient of friction between the chips and the front tool face, resulting in a reduction in the drilling force. Second, good chip formation is beneficial in reducing the roughness of the hole wall; a lower surface roughness of the hole wall reduces the frictional force on the guiding part of the drill bit, which serves to reduce the drilling force [25]. Furthermore, the reduction in friction on the hole wall helps to reduce the generation of drilling heat, and the formation of good chips helps to dissipate the drilling heat.…”
Section: Effect Of Drilling Speed On the Drilling Force And Hole Diam...mentioning
confidence: 99%
“…This forms good chips and reduces the coe cient of friction between the chips and the front tool face, resulting in a reduction in the drilling force. Second, good chips formation is bene cial to reduce the roughness of the hole wall, a lower surface roughness of the hole wall reduces the frictional force on the guiding part of the drill bit, which serves to reduce the drilling force (Ni et al 2022). Furthermore, the reduction in friction on the hole wall helps to reduce the generation of drilling heat, and the formation of good chips helps to dissipate the drilling heat.…”
Section: Effect Of Drilling Speed On the Drilling Force And Pore Morp...mentioning
confidence: 99%
“…Hole quality decreases with increasing feed per revolution. Ni et al [34] checked how different values of technological parameters (n = 1000; 2000; 3000; 4000; 5000 rpm and f = 50; 100; 150; 200; 250 mm/min) affect surface roughness. The best surface quality was obtained when drilling with a high value of spindle speed and a low value of feed per revolution.…”
Section: Introductionmentioning
confidence: 99%