Effect of Dopants on the Dissolution Behavior of Silicon Substrates in HF-Based Cleaning Solutions

Jeriban, Salima Abu; Guiot, Ivette; Bacherius, Luc; Proost, Joris; Sleeckx, Erik; Vos, Rita De; Mertens, Paul

doi:10.4028/3-908451-46-9.139

Solid State Phenomena

2007

DOI: 10.4028/3-908451-46-9.139

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Effect of Dopants on the Dissolution Behavior of Silicon Substrates in HF-Based Cleaning Solutions

Salima Abu Jeriban¹,

Ivette Guiot²,

Luc Bacherius³

et al.

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Effect of Dopants on the Dissolution Behavior of Silicon Substrates in HF-Based Cleaning Solutions

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