Effect of deposition rate on anti-reflection and wettability properties of RF magnetron sputtering SiCON thin film

Aghaei, Abbas Ali; Eshaghi, Akbar; Ramazani, Mazaher; Zabolian, Hossein; Abbasi-Firouzjah, Marzieh

doi:10.1007/s11082-024-06709-9

Opt Quant Electron

2024

DOI: 10.1007/s11082-024-06709-9

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Effect of deposition rate on anti-reflection and wettability properties of RF magnetron sputtering SiCON thin film

Abbas Ali Aghaei,

Akbar Eshaghi,

Mazaher Ramazani

et al.

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Effect of N2 reactive gas flow rate on the structural, optical and wettability properties of silicon carbon oxynitride thin films

Aghaei,

Eshaghi,

Ramazani

et al. 2024

Heliyon

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Effect of N2 reactive gas flow rate on the structural, optical and wettability properties of silicon carbon oxynitride thin films

Aghaei,

Eshaghi,

Ramazani

et al. 2024

Heliyon

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Effect of deposition rate on anti-reflection and wettability properties of RF magnetron sputtering SiCON thin film

Cited by 1 publication

References 38 publications

Effect of N2 reactive gas flow rate on the structural, optical and wettability properties of silicon carbon oxynitride thin films

Effect of N2 reactive gas flow rate on the structural, optical and wettability properties of silicon carbon oxynitride thin films

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