Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

Avci, I.; Tepe, Mustafa; Abukay, D.

doi:10.1016/j.ssc.2004.01.041

Cited by 6 publications

(5 citation statements)

References 17 publications

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“…This indicates a good J C uniformity over the whole area of the YBCO films. These results are quite impressive when compared with those previously reported [13][14][15]. The superconducting transition temperatures of the films were measured by the standard four-probe method.…”

Section: Resultssupporting

confidence: 72%

Batch production of large-area double-sided YBa₂Cu₃O_7−δthin films by DC magnetron sputtering

Ding

et al. 2009

Supercond. Sci. Technol.

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Using a novel DC magnetron sputtering system, high quality YBa2Cu3O7−δ (YBCO) thin films were deposited on both sides of twelve pieces of 3-inch LaAlO3(00l) single crystal substrates in one batch. This sputtering system has a rotatable disc sample holder with the LaAlO3 substrates being positioned in the middle of upper and lower YBCO targets. These two sputter guns are arranged to simultaneously deposit YBCO thin films on both sides of the substrate. The rotatable sample holder is an important approach to large scale deposition of high quality YBCO thin films. In this manner, the sputtered species can diffuse well around the substrates during one rotation cycle. Furthermore, the anode is installed in the inner of rotatable disc sample holder to avoid negative ion bombardment. Thus, a good uniformity over the whole area for all the films has been realized. The full-width at half-maximum (FWHM) values of the (005) rocking curves typically range from 0.49° to 0.56°. The superconducting critical temperatures fall in the range of 89–90 K and the critical current densities are between 3.75 and 4.0 MA cm−2 at 77 K. The microwave surface resistance, RS (77 K, 10 GHz), of the YBCO thin films range typically from 0.56 to 0.71 mΩ, which make these films suitable for microwave applications.

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Section: Resultssupporting

confidence: 72%

Batch production of large-area double-sided YBa₂Cu₃O_7−δthin films by DC magnetron sputtering

Ding

et al. 2009

Supercond. Sci. Technol.

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“…The thin films were deposited under the fixed deposition conditions such as; the partial pressures of Ar and O 2 gases of 0.5 mbar and 0.1 mbar, respectively, plasma power of 45 W, and substrate temperature of 800°C. The resulting deposition rate was about 1.3 nm/min [23]. We obtained c-axis epitaxial YBCO thin films using the above optimum deposition parameters.…”

Section: Samples and Experimental Setupmentioning

confidence: 98%

The superconducting transition width and illumination wavelength dependence of the response of MgO substrate YBCO transition edge bolometers

Öktem¹,

Bozbey²,

Avci³

et al. 2007

Physica C: Superconductivity

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Dependence of the phase and magnitude of the response of MgO substrate YBa 2 Cu 3 O 7Àd (YBCO) transition edge bolometers to the near infrared radiation on the superconducting transition width is presented in this work. The bolometers were made of YBCO thin films of 200 nm thickness that were grown on single crystal MgO (1 0 0) substrates by DC inverted cylindrical magnetron sputtering. We have measured the responses of both large and small area devices with respect to the bias temperature and radiation modulation frequency. We have observed that the superconducting transition width has major effects on the response of the bolometers such as; on a dip of the phase of the response versus modulation frequency curve around 1 Hz, the rate of decrease of the magnitude of the response, and dependence of the phase of the response on temperature at mid-range modulation frequency. We have investigated a correlation between the superconducting transition width and the YBCO film surface morphology of the devices. In addition, the illumination wavelength dependence of the optical response of both wide and narrow transition width devices has been investigated. Here we present the analysis and the possible mechanisms that can affect the response of the bolometers at the superconducting transition region.

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“…After the deposition, the thin films were first measured as resistance versus temperature in order to characterize their superconducting transition temperatures and transition widths (Table 1). Superconducting transition temperatures, T c , of the thin film samples were found as typically 88-89 K with transition widths of about 0.5 K from T c-zero to T c-onset as presented somewhere else [19]. However the transition widths of resistance versus temperature characteristics of the 4 m patterned films were about ∼1.5 K which shows a slight degradation in the film quality which can be associated with the wet etching process as shown in Fig.…”

Section: Ybco Thin Filmmentioning

confidence: 90%

“…Most of them are related to the structural properties of YBCO thin films and junctions on them. Therefore, the research on the optimization of thin film structure is vital [18,19]. Critical current density of YBCO thin films depends on the amount of strong pinning sites inside the film structure [20].…”

Section: Introductionmentioning

confidence: 99%

Signal performance of DC-SQUIDs with respect to YBCO thin film deposition rate

Avci

Algul

Akram

et al. 2009

Sensors and Actuators A: Physical

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a b s t r a c tThe signal performances of YBa 2 Cu 3 O 7−ı (YBCO) direct current superconducting quantum interference devices (DC-SQUIDs) have been investigated as a function of the thin film structure affected by the growth process. YBCO thin films of 200 nm thicknesses were deposited by DC magnetron sputtering using different deposition rates between 1.0 nm/min and 2.0 nm/min onto 24• bicrystal SrTiO 3 (STO) substrates. The thin film samples were subsequently analyzed by XRD and AFM in order to determine their crystalline structures and surface morphologies respectively. The 67 pH directly coupled DC-SQUIDs with 4 m-wide bicrystal Josephson junctions were fabricated, and characterized with respect to their device performances. The variations in the critical current (I c ), the voltage modulation depth ( V) and the noise performance of DC-SQUIDs were reported. The SQUIDs having relatively low deposition rate of 1.0 nm/min was observed to have larger voltage modulation depth as well as higher critical current than that of the samples having larger rate of 2.0 nm/min. The better noise performances were observed as the film deposition rate decreases. The results were associated with the thin film structure and the SQUID characteristics.

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Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

Cited by 6 publications

References 17 publications

Batch production of large-area double-sided YBa₂Cu₃O_7−δthin films by DC magnetron sputtering

Batch production of large-area double-sided YBa₂Cu₃O_7−δthin films by DC magnetron sputtering

The superconducting transition width and illumination wavelength dependence of the response of MgO substrate YBCO transition edge bolometers

Signal performance of DC-SQUIDs with respect to YBCO thin film deposition rate

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Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

Cited by 6 publications

References 17 publications

Batch production of large-area double-sided YBa2Cu3O7−δthin films by DC magnetron sputtering

Batch production of large-area double-sided YBa2Cu3O7−δthin films by DC magnetron sputtering

The superconducting transition width and illumination wavelength dependence of the response of MgO substrate YBCO transition edge bolometers

Signal performance of DC-SQUIDs with respect to YBCO thin film deposition rate

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Batch production of large-area double-sided YBa₂Cu₃O_7−δthin films by DC magnetron sputtering

Batch production of large-area double-sided YBa₂Cu₃O_7−δthin films by DC magnetron sputtering