2022
DOI: 10.1002/slct.202202818
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Effect of Cu Vacancy on Cu3Si(001) Surface for the Synthesis of SiHCl3 by Hydrogenation of SiCl4:A DFT Study

Abstract: In this paper, the effect of Cu vacancy of Cu3Si(001) surface for the hydrogenation of silicon tetrachloride was systematically studied by density functional theory (DFT). The favorable adsorption sites and stable configurations of reaction species are obtained and three possible reaction paths of SiHCl3 formation were achieved by transition state search. For the perfect Cu3Si(001) surface(P), Path1 is the most favorable, with a reaction barrier of 158.15 kJ mol−1. For both the single Cu‐vacancy(SV) and double… Show more

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