Effect of crystal and crucible rotations on the interface shape of Czochralski grown silicon single crystals

Analysis of W-shape melt/crystal interface formation in Czochralski silicon crystal growth

“…The melt flow inside the crucible is governed by interaction of several driving forces i.e. buoyancy, thermocapillary, and forced convection (crystal and crucible rotation) [2][3][4]. These forces should be balanced in order to form the melt/crystal interface shape as flat as possible.…”

“…It has been pointed out that flatter interface is beneficial in terms of stress generation and defect generation in the crystal. However, altering the forced convection forms a new interface shape by disturbing the thermal field particularly at the adjacent of the interface [4][5][6]. For a fixed growth rate, melt level and crystal rotation rate are identified as the two main parameters, which determine the interface shape.…”

“…It is known that the probability of the W-shape interface formation is higher for early stage of the crystal growth when the melt level has not yet dropped. The appearance of W-shape interface has also been investigated for a wide range of crystal and crucible rotations by means of numerical simulations [4]. For many combinations, lower deflections were obtained for W-shape interfaces.…”

Optimization of silicon crystallization in a Bridgman growth furnace by numerical modeling

“…Although these aspects require 3D models of the crystallization process, current models are often limited to 2D simulation (assuming axisymmetric conditions or planar configurations) or quasi-stationary models [1][2][3][4][5][6][7][8][9][10][11][12].…”

Effect of steady crucible rotation on the segregation of impurities in vertical Bridgman growth of multi-crystalline silicon

“…Steady rotation of the crucible or the crystal are widely applied to Czochralski growth systems [8,9] and relatively little to Bridgman systems [5][6][7]. More commonly, the accelerated crucible rotation technique (ACRT) has been applied to Bridgman systems [10][11][12][13][14][15][16].…”