Semiconductor packaging based on an epoxy molding compound
(EMC)
currently has several disadvantages including warpage, limited processing
area, and variability that all negatively affect cost and production
yield. We propose a facile EMC molding process method using a flash
electro-thermal carbon fiber heating (FE-CH) device based on carbon
fiber-based papers to manufacture an EMC molded to a copper substrate
(EMC/Cu bi-layer package) via Joule heating, and using this device,
a modified cure cycle that combines the conventional cure cycle (CCC)
with rapid cooling was performed using FE-CH to reduce the curvature
of the EMC/Cu bi-layer package. Compared to the conventional hot press
process, which uses 3.17 MW of power, the FE-CH process only uses
32.87 kW, resulting in a power consumption reduction of over 100 times
when following the CCC. Furthermore, the FE-CH-cured EMC/Cu bi-layer
package exhibits mechanical properties equivalent to those of a hot
press-cured specimen, including the degree of cure, elastic modulus,
curvature, bonding temperature, residual strain, and peel strength.
The modified cure cycle using the FE-CH results in a 31% reduction
in residual strain, a 32% reduction in curvature, and a 47% increase
in peel strength compared to the CCC, indicating that this new process
method is very promising for reducing a semiconductor package’s
price by reducing the process cost and warpage.