2013
DOI: 10.1186/1556-276x-8-91
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Effect of concurrent joule heat and charge trapping on RESET for NbAlO fabricated by atomic layer deposition

Abstract: The RESET process of NbAlO-based resistive switching memory devices fabricated by atomic layer deposition is investigated at low temperatures from 80 to 200 K. We observed that the conduction mechanism of high resistance state changed from hopping conduction to Frenkel-Poole conduction with elevated temperature. It is found that the conductive filament rupture in RRAM RESET process can be attributed not only to the Joule heat generated by internal current flow through a filament but also to the charge trap/det… Show more

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Cited by 20 publications
(9 citation statements)
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References 16 publications
(13 reference statements)
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“…Oxide materials with large dielectric constants (so-called high- k dielectrics) have attracted much attention due to their potential use as gate dielectrics in metal-oxide-semiconductor field-effect transistor (MOSFETs) [ 8 - 12 ]. Thicker equivalent oxide thickness, to reduce the leakage current of gate oxides, is obtained by introducing the high- k dielectric to real application [ 13 - 15 ].…”
Section: Reviewmentioning
confidence: 99%
“…Oxide materials with large dielectric constants (so-called high- k dielectrics) have attracted much attention due to their potential use as gate dielectrics in metal-oxide-semiconductor field-effect transistor (MOSFETs) [ 8 - 12 ]. Thicker equivalent oxide thickness, to reduce the leakage current of gate oxides, is obtained by introducing the high- k dielectric to real application [ 13 - 15 ].…”
Section: Reviewmentioning
confidence: 99%
“…Finally, the deconvoluted Nb­(3d) spectrum (Figure c) display two subpeaks at 206.78 and 209.386 eV, which is corresponded to Nb­(3d 5/2 ) and Nb­(3d 3/2 ) chemical states. The peaks values are varied slightly from the reported values of pure Nb 2 O 5 , which establishes the interaction between the atoms present on the Nb 2 O 5 and g-C 3 N 4 surfaces that resulted in the formation of effective heterojunctions between them. Additionally, no extra peaks are observed during deconvolution, which suggested the high purity of the sample.…”
Section: Resultsmentioning
confidence: 78%
“…As shown in Fig. 3f, g , the content of Nb 4+ (core level shift (CLS) 203.4, 206.1 eV) 44 , 45 in LiNb 2 O 5 is decreased from 48.8 to 30% after the reaction, indicating that LiNb 2 O 5 was oxidized. Correspondingly, the sulfur 2 p spectrum illustrates the reduction of Li 2 S 6 with the formation of Li 2 S 2 (CLS 161.7 eV) and Li 2 S (CLS 160 eV) 46 , 47 (Fig.…”
Section: Resultsmentioning
confidence: 84%