2014
DOI: 10.1016/j.mee.2012.12.009
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Effect of composition of post etch residues (PER) on their removal in choline chloride–malonic acid deep eutectic solvent (DES) system

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Cited by 10 publications
(3 citation statements)
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“…A pilot plant was constructed to test the efficacy of using DESs for large scale metal extraction. Choline chloride:urea and choline chloride:malonic acid have been shown to be effective in the removal of copper oxides and fluorides from post etch residues, and the malonic acid based liquid has also been successful in the removal of residues from the CF 4 /O 2 etching of a copper coated DUV photoresist . DESs have also shown promise in removing organic sulfides from fuels …”
Section: Metal Processing Applicationsmentioning
confidence: 99%
“…A pilot plant was constructed to test the efficacy of using DESs for large scale metal extraction. Choline chloride:urea and choline chloride:malonic acid have been shown to be effective in the removal of copper oxides and fluorides from post etch residues, and the malonic acid based liquid has also been successful in the removal of residues from the CF 4 /O 2 etching of a copper coated DUV photoresist . DESs have also shown promise in removing organic sulfides from fuels …”
Section: Metal Processing Applicationsmentioning
confidence: 99%
“…DESs composed of solely bio-derived materials can be produced, e.g., choline chloride (ChCl) and urea [ 15 ], which is the most widely studied eutectic mixture. In the industrial field, DESs are currently used for metal processing [ 10 , 16 , 17 ], such as metal deposition, metal dissolution, or rust removal. On the other hand, in the field of cultural heritage conservation, DESs have only been applied as temporary consolidants [ 18 ] and cleaning agents for organic varnishes [ 19 ].…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6] The hydrophobic DESs are composed of organic hydrogen bonding donors and acceptors. Their extractive capabilities have been illustrated in pharmaceuticals, [6][7][8] food industry, 9 metal industry 10,11 and carbon dioxide capture applications. 1,[12][13][14][15] They are also promising candidates for liquid-liquid extraction of micro and nano pollutants from aqueous solutions due to their immiscibility, 16,17 low volatility, 7,[18][19][20] and low toxicity.…”
Section: Introductionmentioning
confidence: 99%