Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films

Kim, Sun Kyu; Le, Vinh V.; Vinh, Pham Van; Lee, Jae Woo

doi:10.1016/j.surfcoat.2008.06.019

Cited by 49 publications

(18 citation statements)

References 14 publications

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“…The residual stresses increase with increasing bias voltage which generally stems from the increase in kinetic energy of the impinging ions. The increase in bias voltage results in the transference of more energy to the coating during growth, and thus the residual compressive stresses also increase [34]. Ion bombardment of the growing film can suppress grain growth and permit the formation of nc-coatings [8].…”

Section: Residual Stress Analysis and Nanoindentationmentioning

confidence: 99%

Adhesive-deformation relationships and mechanical properties of nc-AlCrN/a-SiNx hard coatings deposited at different bias voltages

et al. 2018

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A series of Al-Cr-SiN hard coatings were deposited on WC-Co substrates with a negative substrate bias voltage ranging from-50 to-200 V using cathodic arc evaporation system. A Rockwell-C adhesion test demonstrated that excellent adhesion was observed at lower bias voltages of-50 V and-80 V, while further increases in bias voltage up to-200 V led to severe delamination and worsening of the overall adhesion strength. X-ray diffraction and transmission electron microscopy analysis revealed a single phase cubic B1-structure identified as an AlCrN solid solution with a nanocomposite microstructure where cubic AlCrN nanocrystals were embedded in a thin continuous amorphous SiNx matrix. Coatings exhibited a 002-texture evolution that was more pronounced at higher bias voltages (≥-120 V). Stress-induced cracks were observed inside the coatings at high bias voltages (≥-150 V), which resulted in stress relaxation and a decline in the overall residual stresses.

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Section: Residual Stress Analysis and Nanoindentationmentioning

confidence: 99%

Adhesive-deformation relationships and mechanical properties of nc-AlCrN/a-SiNx hard coatings deposited at different bias voltages

et al. 2018

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“…The SAED patterns in TEM analysis did not detect crystalline silicon nitride. The absence of XRD peaks and TEM diffraction spots confirmed the fact a compound with silicon was formed in the amorphous phase [26]. This result illustrated that the crystallite sizes of Cr-Si-N coatings can be greatly refined by addition of a certain amount of Si.…”

Section: Resultsmentioning

confidence: 72%

Microstructure and mechanical properties of Cr–Si–N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

Zou

Wang

et al. 2009

Journal of Alloys and Compounds

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“…The studies a lot of authors stated the formation of the nanocomposite structure [10][11][12][13][14][15]. The influence of the deposition parameters on the mechanical properties of CrAlSiN-thin coatings was discussed in research of Ding [11] and Kim [16]. Elkaseer et al [17] presented the results of the FEM modeling of chip formation and surface generation during the turning of stainless steel material.…”

Section: Introductionmentioning

confidence: 99%

The Tool Life and Coating-Substrate Adhesion of AlCrSiN-Coated Carbide Cutting Tools Prepared by LARC with Respect to the Edge Preparation and Surface Finishing

et al. 2020

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Nanocomposite AlCrSiN hard coatings were deposited on the cemented carbide substrates with a negative substrate bias voltage within the range of −80 to −120 V using the cathodic arc evaporation system. The effect of variation in the bias voltage on the coating-substrate adhesion and nanohardness was investigated. It was clear that if bias voltage increased, nanohardness increased in the range from −80 V to −120 V. The coating deposited at the bias voltage of −120 V had the highest nanohardness (37.7 ± 1.5 GPa). The samples were prepared by brushing and wet microblasting to finish a surface and prepare the required cutting edge radii for the tool life cutting tests and the coating adhesion observation. The indents after the static Mercedes indentation test were studied by scanning the electron microscope to evaluate the coating-substrate adhesion. The longer time of edge preparation with surface finishing led to a slight deterioration in the adhesion strength of the coating to the substrate. The tool wear of cemented carbide turning inserts was studied on the turning centre during the tool life cutting test. The tested workpiece material was austenitic stainless steel. The cemented carbide turning inserts with larger cutting edge radius were worn out faster during the machining. Meanwhile, the tool life increased when the cutting edge radius was smaller.

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Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films

Cited by 49 publications

References 14 publications

Adhesive-deformation relationships and mechanical properties of nc-AlCrN/a-SiNx hard coatings deposited at different bias voltages

Adhesive-deformation relationships and mechanical properties of nc-AlCrN/a-SiNx hard coatings deposited at different bias voltages

Microstructure and mechanical properties of Cr–Si–N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

The Tool Life and Coating-Substrate Adhesion of AlCrSiN-Coated Carbide Cutting Tools Prepared by LARC with Respect to the Edge Preparation and Surface Finishing

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