Effect of Carrier Gas Species on Ferroelectric Properties of PZT/Stainless‐Steel Fabricated by CO₂ Laser‐Assisted Aerosol Deposition

Abstract

Pb(Zr,Ti)O 3 (PZT) thick films were deposited onto stainlesssteel substrates by aerosol deposition using different kinds of carrier gases and were irradiated by CO 2 laser both during and after deposition, for the recovery of ferroelectricity. The ferroelectric and dielectric properties of PZT films deposited using oxygen and nitrogen gases and irradiated by CO 2 laser were superior to those of films deposited using He gas and irradiated by the laser. Some kinds of defects within the film were relaxed by CO 2 laser irradiation during deposition, and grain growth in the film was promoted by post-annealing using laser irradiation.

Laser‐Annealing of Thermoelectric CuFe0.98Sn0.02O2 Films Produced by Powder Aerosol Deposition Method

“…[ 30 ] The functional properties of the PZT films were significantly increased by heat treatments with different lasers. [ 24–29 ] Furthermore, Shinonaga et al. investigated the positive influence of laser irradiation on the functional properties and the microstructure on TiO 2 PAD films.…”

“…[30] The functional properties of the PZT films were significantly increased by heat treatments with different lasers. [24][25][26][27][28][29] Furthermore, Shinonaga et al investigated the positive influence of laser irradiation on the functional properties and the microstructure on TiO 2 PAD films. [31][32][33] When this type of laser with a relatively low penetration depth should be used to anneal thicker films (>1 µm), it is necessary that the film production and the laser-annealing repeatedly alternate.…”

“…[ 23 ] In contrast, laser‐based annealing could provide additional advantages like a reduced annealing time or a targeted local property change as it was shown by Palneedi et al. for PZT (Pb(Zr,Ti)O 3 ) [ 24–30 ] and Shinonaga et al. for TiO 2 .…”

What Happens during Thermal Post‐Treatment of Powder Aerosol Deposited Functional Ceramic Films? Explanations Based on an Experiment‐Enhanced Literature Survey

“…[155][156][157] For dielectric and piezoelectric PAD films, these film properties were already significantly improved by laser annealing. [158][159][160] Furthermore, it was also proven, that the electrical resistance of PAD-titania films could by tuned by a CW fiber laser. [161] Even though powder aerosol deposited functional films may currently require a post-deposition treatment to unleash their full potential, their key advantages like the formation of fully dense films with high mechanical stability and substrate adhesion are still unreached by other ceramic deposition techniques.…”

“…[ 155–157 ] For dielectric and piezoelectric PAD films, these film properties were already significantly improved by laser annealing. [ 158–160 ] Furthermore, it was also proven, that the electrical resistance of PAD‐titania films could by tuned by a CW fiber laser. [ 161 ]…”