Effect of bottom electrode structure on electrical properties of BaTiO3 thin films fabricated by CSD method

Sakamoto, Naonori; Yoshioka, Haruna; Suzuki, Junpei; Suzuki, Tohru; Wakiya, Naoki; Suzuki, Hisao

doi:10.2109/jcersj2.118.669

Cited by 6 publications

(4 citation statements)

References 34 publications

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“…[24][25] Integration of the metallic layer, LaNiO 3 (LNO) offers the benefit of balancing strain arising from structural mismatch, and the thermal strain arising from the expansion coefficients of Si and BTO, which are known to severely impact the BTO film stability and to impose undesired orientation of the polarization. [26][27][28]…”

Section: Introductionmentioning

confidence: 99%

Probing Individual Layers in Functional Oxide Multilayers by Wavelength‐Dependent Raman Scattering

Kreisel

Weber

Dix

et al. 2012

Adv Funct Materials

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International audienceThe integration of functional oxides on silicon requires the use of complex heterostructures involving oxides of which the structure and properties strongly depend on the strain state and strain-mediated interface coupling. The experimental observation of strain-related effects of the individual components remains challenging. Here, a Raman scattering investigation of complex multilayer BaTiO3/LaNiO3/CeO2/YSZ thin-film structures on silicon is reported. It is shown that the Raman signature of the multilayers differs significantly for three different laser wavelengths (633, 442, and 325 nm). The results demonstrate that Raman scattering at various wavelengths allows both the identification of the individual layers of functional oxide multilayers and monitoring of their strain state. It is shown that all of the layers are strained with respect to the bulk reference samples, and that strain induces a new crystal structure in the embedded LaNiO3. Based on this, it is demonstrated that Raman scattering at various wavelengths offers a well-adapted, non-destructive probe for the investigation of strain and structure changes, even in complex thin-film heterostructures

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Section: Introductionmentioning

confidence: 99%

Probing Individual Layers in Functional Oxide Multilayers by Wavelength‐Dependent Raman Scattering

Kreisel

Weber

Dix

et al. 2012

Adv Funct Materials

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“…The authors recognized that the dispersion of the BLSD(00l) plane would be determined by the crystallographic dispersion of the bottom interface layers, (100)LNO layer, and (001)ns-CN templates. Many researchers reported that uniaxial (100)-oriented LNO films had an essentially rough and porous microstructure consisting of small crystallites with sizes of several tens nanometers, [28][29][30] which prevent the crystal orientation of the LNO(100) plane with a smaller crystallographic dispersion like single crystal. On the other hand, as ns-CN templates possess a highly aligned crystal structure like single crystal as confirmed by TEM analysis, they can provide better epitaxial templates for preferential crystal growth of the BLSD lattice.…”

Section: Resultsmentioning

confidence: 99%

Crystal Orientation Control of Bismuth Layer-Structured Dielectric Films Using Interface Layers of Perovskite-Type Oxides

Kondoh

Sasajima

Hayashi

et al. 2011

Jpn. J. Appl. Phys.

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Thin films of SrBi4Ti4O15, a kind of bismuth layer-structured dielectrics (BLSDs), were prepared on platinized silicon wafers buffered by perovskite-type oxide interface layers, (100)LaNiO3/(111)Pt/TiO2/(100)Si and (001)Ca2Nb3O10-nanosheets/(111)Pt/TiO2/(100)Si, by chemical solution deposition (CSD). The Ca2Nb3O10 nanosheets were supported on a (111)Pt/TiO2/(100)Si substrate by dip coating using an aqueous dispersion, while (100)LaNiO3 was prepared by CSD. The (00l) planes of BLSD crystal were preferentially oriented on the surface of both substrates, which is caused by suitable lattice matching between the a-(b-)axis of BLSD and perovskite-type oxide layers. The film deposition on (001)Ca2Nb3O10 nanosheets yielded (001)-oriented BLSD films with higher crystallinity and smaller fluctuation in the tilting angle of the (001)BLSD plane than those on the (100)LaNiO3 interface layer. The dielectric constant (εr) of (001)-oriented SrBi4Ti4O15 film on (001)Ca2Nb3O10-nanosheets/(111)Pt/TiO2/(100)Si substrate was approximately 190, which was significantly stable against the change of frequency and bias voltage compared with that of the randomly-oriented SrBi4Ti4O15 film.

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“…However, lead oxide is the toxicity. 2) On the other hand, BT is one of the main lead-free electronics for dielectric, piezoelectric, and electro-optic applications. 2) Meanwhile, an example of using a polymer material with dielectric properties was provided in a previous report, 3) in which a polymer piezoelectric biosensor with a polyvinylidene fluoride (PVDF) was proposed.…”

Section: Introductionmentioning

confidence: 99%

“…2) On the other hand, BT is one of the main lead-free electronics for dielectric, piezoelectric, and electro-optic applications. 2) Meanwhile, an example of using a polymer material with dielectric properties was provided in a previous report, 3) in which a polymer piezoelectric biosensor with a polyvinylidene fluoride (PVDF) was proposed. In this report, we proposed that it is possible to detect biopolymers using the adsorption characteristics of the hostguest reaction on the sensor via the relaxation behavior of the ¢-PVDF piezoelectric material.…”

Section: Introductionmentioning

confidence: 99%

Effect of dispersant viscosity for self-assembly process of barium titanate aggregates in material texture of polyvinylidene fluoride composites —evaluation of multifractal dimension (Dq [q = 0, 1, 2]) and dielectric properties—

Takeda

Yamazaki

Sato

et al. 2022

J. Ceram. Soc. Japan

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In this paper, the properties of the barium titanate (BT)/polyvinylidene fluoride (PVDF) composites were controlled by the self-assembly of the BT secondary particle groups. The self-assembled BT/PVDF composites of 520 vol.% BT were prepared with the difference in the viscosity of polyethylene glycol (PEG) of dispersants involved in the self-assembly process. The multifractal properties and dielectric properties of the self-assembled BT/PVDF composites were investigated with controlling by the formation of the self-assembled BT secondary particle groups. The dielectric constant (¾¤) increased with an increase in the average secondary particle area (S) of the BT particles. The S increased with an increase in the viscosity of PEG; whereas, the ¾¤ decreased with the increase in viscosity. The multifractal analysis indicated that the distribution of self-assembled BT secondary particle groups was affected by PEG viscosity. The sample with PEG1000 had aggregates with a BT/PVDF/BT heterointerface, the sample with PEG20000 had agglomerates with a BT/BT interface, and the sample with PEG2000 had both, aggregates and agglomerates. The BT/PVDF/BT heterointerface in the BT aggregates played an important role in improving the dielectric properties of the BT/PVDF composites. Overall, the viscosity of the dispersant affected the self-assembly process as well as the ¾¤. It was suggested that the multifractal properties and dielectric properties were controlled by the self-assembly of the BT secondary particle groups.

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Effect of bottom electrode structure on electrical properties of BaTiO3 thin films fabricated by CSD method

Cited by 6 publications

References 34 publications

Probing Individual Layers in Functional Oxide Multilayers by Wavelength‐Dependent Raman Scattering

Probing Individual Layers in Functional Oxide Multilayers by Wavelength‐Dependent Raman Scattering

Crystal Orientation Control of Bismuth Layer-Structured Dielectric Films Using Interface Layers of Perovskite-Type Oxides

Effect of dispersant viscosity for self-assembly process of barium titanate aggregates in material texture of polyvinylidene fluoride composites —evaluation of multifractal dimension (<i>D<sub>q</sub></i> [<i>q</i> = 0, 1, 2]) and dielectric properties—

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