“…4,5 In literature, the diffusion of Cr into Si and the formation of CrSi 2 phase have been studied by resistivity measurement, 3,9,10 secondary ion mass spectroscopy, 11 Hall mobility, 10 Rutherford back scattering, 12 differential optical spectroscopy, 13,14 atomic force microscopy, 13,14 cross sectional scanning electron microscopy, 5 Auger spectroscopy, 3 and X-ray photoelectron spectroscopy. 15 Although these techniques are suitable in determining the metal (Cr) diffusion in Si, no crystallographic study can be carried out.…”