Effect of bias on the structure and properties of TiZrN thin films deposited by unbalanced magnetron sputtering

Lin, Yi; Chen, Hsi-An; Yu, Ge-Ping; Huang, Jia-Hong

doi:10.1016/j.tsf.2016.05.021

Cited by 27 publications

(7 citation statements)

References 13 publications

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“…Further increasing the Mo content (26.14 atom %) led to TiAlMoN coating back to the columnar sharp (Figure 2e) corresponding to zone I in ASZM. 50 The AFM surface topography of all TiAlMoN coatings showed similar variation in particle shape as observed in SEM images. With increasing Mo content, a significant change in the topography of the TiAlMoN coatings was observed.…”

Section: Coating Morphology and Surface Topographysupporting

confidence: 58%

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In Vitro Corrosion and Wear Investigation of Multifunctional TiAlMoN Sputtered Coatings on Cold-Sprayed SS316L

Belgroune,

Aissani,

Alhussein

et al. 2024

ACS Appl. Eng. Mater.

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Although TiAlN has been thoroughly studied, there is still an ongoing demand for developing new-based TiAlN films with enhanced protection efficiency for a long lifetime and high load-bearing capability linked to friction and corrosion mechanisms. This work aims to present the effect of Mo content by studying the structural tribomechanical, wettability, and corrosion behaviors in TiAlMoN coatings deposited by magnetron sputtering on cold-sprayed stainless steel 316L substrates. TiAlMoN coatings showed a dense columnar structure with the coexistence of titanium and molybdenum nitrides, and TiN (200) preferred orientation changed to TiN(111) with increasing Mo content. The surface energy of the TiAlMoN coatings decreased gradually with the increase in Mo content. The TiAlMoN coating containing 16.09 atom % Mo possesses the highest hardness and Young's modulus (29.5 and 334.5 GPa, respectively) and the maximum H/E and H 3 /E 2 of 0.092 and 0.237, respectively. Formations of tribolayer oxides reduced the friction and enhanced the wear resistance of TiAlMoN coatings in atmospheric conditions and reached the minimum values of 0.3 and 0.849 × 10 −6 mm 3 /N, respectively, at 16.09 atom % of Mo under 5 N load charge. Corrosion examination in simulated seawater revealed that TiAlMoN coating-coated SS316L exhibited a significant positive shift of about −16 mV in corrosion potential with a notable reduction in corrosion current density (1.41 nA/cm 2 ), confirming the improved corrosion performance. The combination of both cold spray and magnetron sputtering techniques for producing this kind of component is shown to have great potential in processing applications.

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Section: Coating Morphology and Surface Topographysupporting

confidence: 58%

“…50 With the addition of Mo content in the TiAlMoN coatings, the columnar structure gradually disappeared and became denser at 16.09 atom % Mo (Figure 2b,c,d) corresponding to zone T in ASZM. 50 This is attributed to the highly packed (111) plane that has an important role in the densification of film growth.…”

Section: Coating Morphology and Surface Topographymentioning

confidence: 95%

In Vitro Corrosion and Wear Investigation of Multifunctional TiAlMoN Sputtered Coatings on Cold-Sprayed SS316L

Belgroune,

Aissani,

Alhussein

et al. 2024

ACS Appl. Eng. Mater.

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“…TiZrN coating is characterized by a relatively high microhardness, with a change in the coefficient of linear expansion close to the ceramic under heating, which is essential when resisting thermal loads arising in the cutting zone [46,47]. Moreover, it is possible to predict a sufficiently high thermodynamic stability and resistance to the propagation of cracks during operation caused by the high binding energy in the crystal lattice of this coating.…”

Section: Deposition Of Vacuum-plasma Coatings On Ceramics and Coatingmentioning

confidence: 99%

The Role of Thin-Film Vacuum-Plasma Coatings and Their Influence on the Efficiency of Ceramic Cutting Inserts

et al. 2018

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The main problem with ceramics used in cutting tools is related to the unpredictable failures caused by the brittle fracturing of ceramic inserts, which is critical for the intermittent milling of cyclic loading. A 125-mm-diameter eight-toothed end mill, with a mechanical fastening of ceramic inserts, was used as a cutting tool for milling hardened steel (102Cr6). For the experiments, square inserts of the Al2O3 + SiC ceramic were used and compared with the samples made of Al2O3 + TiC to confirm the obtained results. The samples were coated with diamond-like coating (DLC), TiZrN, and TiCrAlN coatings, and their bending strength and adhesion were investigated. Investigations into the friction coefficient of the samples and operational tests were also carried out. The effect of smoothing the microroughness and surface defects in comparison with uncoated inserts, which are characteristic of the abrasive processing of ceramics, was investigated and analyzed. The process developed by the authors of the coating process allows for the cleaning and activation of the surface of ceramic inserts using high-energy gas atoms. The impact of these particles on the cutting edge of the insert ensures its sharpening and reduces the radius of curvature of its cutting edges.

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“…Many methods used to grow nitride thin films had been reported such as chemical vapor deposition [18], magnetron sputtering [19][20][21] and pulsed laser deposition [22]. In this work, we fabricated ZrN x thin films by ion beam assisted deposition (IBAD).…”

Section: Introductionmentioning

confidence: 99%

Effects of assisting ions on the structural and plasmonic properties of ZrN_x thin films

Lu¹,

Ran²,

Zhao³

et al. 2019

J. Phys. D: Appl. Phys.

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Plasmonic ZrN x thin films were prepared by ion beam assisted deposition (IBAD). The effects of the assisting ion current (I a ), assisting ion energy (E a ) and the partial flow rate ratio of N 2 / Ar (r) on the structure and dielectric properties of the films were investigated. The results show that all the films are fcc-structured, and the IBAD films exhibit a preferred fcc-(1 1 1) orientation. Nitrogen content of the films can be improved by higher E a and r, and reduced by higher I a . Higher I a , E a or r can reduce the crossover frequency ω c at which the films turn from dielectric to metallic phase, and reduce the loss function of the films. Moreover, the plasmonic quality factor can also be modulated by these parameters. The main mechanism of the modulation is the variation of the carrier concentration in the films. Our study demonstrates that the IBAD-ZrN x thin films have considerable plasmonic performances, and their dielectric and plasmonic properties can be modulated from visible to near infrared region by assisting ion beam.

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Effect of bias on the structure and properties of TiZrN thin films deposited by unbalanced magnetron sputtering

Cited by 27 publications

References 13 publications

In Vitro Corrosion and Wear Investigation of Multifunctional TiAlMoN Sputtered Coatings on Cold-Sprayed SS316L

In Vitro Corrosion and Wear Investigation of Multifunctional TiAlMoN Sputtered Coatings on Cold-Sprayed SS316L

The Role of Thin-Film Vacuum-Plasma Coatings and Their Influence on the Efficiency of Ceramic Cutting Inserts

Effects of assisting ions on the structural and plasmonic properties of ZrN_x thin films

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Effect of bias on the structure and properties of TiZrN thin films deposited by unbalanced magnetron sputtering

Cited by 27 publications

References 13 publications

In Vitro Corrosion and Wear Investigation of Multifunctional TiAlMoN Sputtered Coatings on Cold-Sprayed SS316L

In Vitro Corrosion and Wear Investigation of Multifunctional TiAlMoN Sputtered Coatings on Cold-Sprayed SS316L

The Role of Thin-Film Vacuum-Plasma Coatings and Their Influence on the Efficiency of Ceramic Cutting Inserts

Effects of assisting ions on the structural and plasmonic properties of ZrN x thin films

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Effects of assisting ions on the structural and plasmonic properties of ZrN_x thin films