Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Gehl, Michael; Gibson, Ricky; Hendrickson, Joshua R.; Homyk, Andrew; Säynätjoki, Antti; Alasaarela, Tapani; Karvonen, Lasse; Tervonen, Ari; Honkanen, Seppo; Zandbergen, Sander; Richards, B. C.; Olitzky, J. D.; Scherer, Axel; Khitrova, G.; Gibbs, H. M.; Kim, Ju‐Young; Lee, Jun Young

doi:10.1364/josab.29.000a55

Cited by 16 publications

(11 citation statements)

References 19 publications

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“…First, the ALD layer has a well‐controlled and uniform thickness and, therefore, results in a surface as smooth as it was prior to deposition. Indeed, it has been shown experimentally that ALD coating does not decrease the quality factor of photonic crystal cavities . Moreover, the refractive index of Al 2 O 3 is much lower than GaAs.…”

Section: Ald Passivationmentioning

confidence: 99%

Integrated all‐optical switch with 10 ps time resolution enabled by ALD

Moille

Combrié

Morgenroth

et al. 2016

Laser & Photonics Reviews

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The potential of GaAs‐based photonic crystals for fast all‐optical switching in the telecom spectral range is exploited by controlling the surface recombination and, thereby, the carrier relaxation dynamics. The structure is entirely coated with a layer of aluminium oxide using atomic layer deposition. This results in a carrier lifetime of about 10 ps, as determined by spectrally resolved pump–probe measurements. We show that the nonlinear response of the resonator is optimized when it is excited with a few‐picoseconds pulse. This dynamics is perfectly captured by our model accounting for the carrier diffusion with an impulse response function. Moreover, the suppression of photo‐induced oxidation is revealed to be crucial to demonstrate all‐optical operation at GHz rates with average coupled pump power of 0.5 mW (hence 100 fJ/bit). The switching window is 12 ps wide (1/e), as resolved by homodyne pump–probe measurements. The devices respond to a sequence of closely spaced pump pulses demonstrating a gating window close to 10 ps, with a contrast as high as 7 dB.

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Section: Ald Passivationmentioning

confidence: 99%

Integrated all‐optical switch with 10 ps time resolution enabled by ALD

Moille

Combrié

Morgenroth

et al. 2016

Laser & Photonics Reviews

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“…For example, by expanding the IL laser beams to a wider angle or by shaping the beam profile to a more uniform distribution, spatial power distribution will become uniform, and spatial variation of the pattern will be decreased. Post-process thin dielectric film coating using atomic layer deposition might also improve Q [26]. Furthermore, the fabrication and measurement schemes presented in this paper can be universally used for other materials, structures, or purposes such as a hard mask for III-V semiconductor materials.…”

Section: Resultsmentioning

confidence: 99%

Fabricating centimeter-scale high quality factor two-dimensional periodic photonic crystal slabs

Lee¹,

Zhen²,

Chua³

et al. 2014

Opt. Express

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We present a fabrication route for centimeter-scale two-dimensional defect-free photonic crystal slabs with quality factors bigger than 10,000 in the visible, together with a unique way to quantify their quality factors. We fabricate Si(3)N(4) photonic crystal slabs, and perform an angle-resolved reflection measurement. This measurement data is used to retrieve the quality factors of the slabs by fitting it to a model based on temporal coupled-mode theory. The macroscopic nature of the structure and the high quality factors of their resonances could open up new opportunities for realizing efficient macroscale optoelectronic devices such as sensors, lasers, and energy harvesting systems.

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“…Nevertheless, recent researches demonstrate that, when some suitable etchant and/or surface passivation are used, a wetetched InP-based nanopillar presents nice optical properties [49]. A sophisticated wet-etching process would have only a minor effect on the quality of a nanocavity [50]. Furthermore, it is worth noting that InP/InGaAsP materials have a relatively low surface recombination velocity than GaAs/AlGaAs materials [51].…”

Section: The Vertical Distribution Patterns Inmentioning

confidence: 99%

Microcavities for Silica-Fiber-Based Quantum Information Processing

Song¹

2017

Optoelectronics - Advanced Device Structures

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High-quality optical microcavities are prospective in many optoelectronics fields like optical communication, nonlinear optics, and quantum information technology. For quantum telecommunication over 1.55 μm silica-fiber-based networks, micropillar cavities containing quantum dots (QDs) are strongly required to construct quantum devices such as single-photon sources (SPSs). The straight way could be using micropillars composed of traditional InGaAsP/InP distributed Bragg reflectors (DBRs), which can in principle serve as efficient 1.55 μm SPSs. To reduce the difficulty in fabricating such~30 μm high pillars, structure hybridizing semiconductor with dielectric materials is designed. Consisting of Si/ SiO 2 DBRs and an InP active layer, such a micropillar readily enhances the rate of singlephoton emitting from an InAs/InP QD to be over GHz and serves as a photon-indistinguishable SPS. To strongly couple a 1.55 μm QD with an optical mode, the Si/SiO 2-InP hybrid micropillar cavity can be reformed by introducing tapered DBR structures. This new hybrid pillar cavity can be diminished to have a sub-micrometer diameter, giving small mode volume and ensuring single QD emission. With quality (Q)fa ct orashi ghas 10 5-10 6 , this cavity can behave as a coherently controllable quantum device. More effective might be the InGaAsP/InP-air-aperture micropillar cavity, which can be fabricated by a monolithic process without hybridizing.

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Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Cited by 16 publications

References 19 publications

Integrated all‐optical switch with 10 ps time resolution enabled by ALD

Integrated all‐optical switch with 10 ps time resolution enabled by ALD

Fabricating centimeter-scale high quality factor two-dimensional periodic photonic crystal slabs

Microcavities for Silica-Fiber-Based Quantum Information Processing

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