Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements

Gao, Lian; To, Suet; Yang, Hongfang; Nie, Xin; Liu, Tianchen; Xue, Changxi

doi:10.1364/ao.53.007341

Cited by 6 publications

(1 citation statement)

References 22 publications

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“…By using multiple layers, a diffractive optical element (DOE) can be achromatized for multiple wavelengths [10,11]. The sensitivity of multilayer DOEs has been studied by analyzing the change in the diffraction efficiency of multilayer DOEs with respect to some common fabrication errors [12,13]. However, only DOEs that are designed to diffract all energy into one diffraction order were analyzed.…”

Section: Introductionmentioning

confidence: 99%

Analysis of grating doublets for achromatic beam-splitting

Pacheco¹,

Milster²,

Liang³

2015

Opt. Express

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Achromatic beam-splitting grating doublets are designed for both continuous phase and binary phase gratings. By analyzing the sensitivity to lateral shifts between the two grating layers, it is shown that continuous-profile grating doublets are extremely difficult to fabricate. Achromatic grating doublets that have profiles with a constant first spatial derivative are significantly more resistant to lateral shifts between grating layers, where one design case showed a 17 times improvement in performance. Therefore, binary phase, multi-level phase, and blazed grating doublets perform significantly better than continuous phase grating doublets in the presence of a lateral shift between two grating layers. By studying the sensitivity to fabrication errors in the height of both grating layers, one grating layer height can be adjusted to maintain excellent performance over a large wavelength range if the other grating layer is fabricated incorrectly. It is shown in one design case that the performance of an achromatic Dammann grating doublet can be improved by a factor of 215 if the heights of the grating layers are chosen to minimize the performance change in the presence of fabrication errors.

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Section: Introductionmentioning

confidence: 99%

Analysis of grating doublets for achromatic beam-splitting

Pacheco¹,

Milster²,

Liang³

2015

Opt. Express

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Comprehensive polychromatic integral diffraction efficiency sensitivity to tilt error for multilayer diffractive optical elements with oblique incidence

et al. 2020

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Oblique incidence is the general working state for multilayer diffractive optical elements (MLDOEs) in an imaging optical system. The polychromatic integral diffraction efficiency (PIDE) is very sensitive to the incident angle. Therefore, it is necessary to analyze the effect of tilt error on diffraction efficiency/PIDE with oblique incidence. The theoretical model of the relationship between the diffraction efficiency and tilt error with oblique incidence is presented, and the effect of tilt error on diffraction efficiency/PIDE is analyzed. The analysis model of comprehensive PIDE for a certain range of incident angles and the tilt error for MLDOEs is established. The simulation results showed that the comprehensive PIDE is sensitive to tilt angle with oblique incidence, and the tolerance of the tilt error angle can be determined by the comprehensive PIDE. The tilt error tolerance is furthermore investigated with decenter error based on the maximum of comprehensive PIDE. The method and results can be used to guide the tolerance formulation of tilt error for MLDOEs in hybrid optical systems.

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Glued diffraction optical elements with broadband and a large field of view

et al. 2020

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High diffraction efficiency is an important requirement for hybrid diffractive-refractive optical systems with a wide field of view. The issue is that diffractive optical elements cannot maintain high diffraction efficiency across a designed waveband and range of incident angles simultaneously. Glued diffractive optical elements (GDOEs) consist of two single-layer diffractive elements, and optical adhesives are presented to address the problem. Two diffractive optical elements are glued together to reduce the straylight scattered into unwanted diffraction orders. The parameters of diffractive optical elements are optimized to achieve broadband high diffraction efficiency and modulation transfer function over a wide-incident-angle range. The GDOEs enable the system to realize a diffraction efficiency of over 90% when the incident angle is no more than 58°. Through gluing two single-layer diffractive optical elements together, we can minimize the inner reflection and refraction. Diffraction efficiency losses can be compensated by the optical adhesives layer, and image quality can be improved. Our design method could make possible the use of diffraction elements in different kinds of optical systems.

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Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements

Cited by 6 publications

References 22 publications

Analysis of grating doublets for achromatic beam-splitting

Analysis of grating doublets for achromatic beam-splitting

Comprehensive polychromatic integral diffraction efficiency sensitivity to tilt error for multilayer diffractive optical elements with oblique incidence

Glued diffraction optical elements with broadband and a large field of view

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