Effect of Argon Annealing Treatment on Photoelectric Properties of GZO Films Deposited by Atomic Layer Deposition
Junxia LiuYang,
Lei Wang,
Xinhua He
et al.
Abstract:Gallium-doped zinc oxide (GZO) thin films with (100) preferred orientation were prepared on SiO 2 /Si substrates by atomic layer deposition (ALD). Effects of argon annealing temperature on GZO thin films were systematically investigated by X-ray diffraction (XRD), scanning electron spectroscopy (SEM), X-ray photoelectron spectroscopy (XPS), photoluminescence (PL), and Hall-effect measurement. XRD analysis showed that as the annealing temperature increased from 450 to 850 °C, the crystallization performance was… Show more
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