Effect of Ar/CH₄Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering

Abstract

Ag/C:H films were deposited by DC sputtering method on Si substrates with different Ar/CH4gas mixture ratios. Effect of Ar/CH4gas mixture ratios was investigated on optical and structural properties of Ag/C:H films by FTIR spectroscopy analysis, X-Ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM), respectively. In order to evaluate the effect of gas flow ratio on the optical and structural properties of Ag/C:H films, Ar/CH4gas ratio was changed by keeping the Ar flow rate constant while varying the CH4gas flow rate (2, 5, and 10 SCCM). From FTIR analysis it was observed that increase in the Ar/CH4gas ratio results in decreasing the sputtered Ag nanoparticles and increasing of C–H bonds. Also from XRD pattern it was found that intensity of Ag crystalline plane and average grain size decrease by adding CH4to working gas admixture. From SEM and AFM micrographs, size of the grains also became smaller on the surface of the films, which will lead to decreasing the roughness of the deposited thin films.

Microrecycling of the metal–polymer-laminated packaging materials via thermal disengagement technology

“…As a result, a momentous change in the peak intensities can be observed with the time and temperatures. The residual peaks from the absorption band at ~ 3044 cm −1 instigated by C-H stretching vibration with the medium appearance in the alkene compound class can be assigned to CH, CH 2 , and CH 3 groups with the sp 2 and sp 3 configurations where below 3000 cm −1 wave numbers, the smaller peaks correspond to the stretching (asymmetrical) in CH 2 with the sp 3 aliphatic configuration [58]. The absorption band at ~ 1605 cm −1 can be ascribed to the medium cyclic aromatic hydrocarbon group (alkene) with the ring vibration of carbon linear bonds (C=C) [58,59].…”

“…The residual peaks from the absorption band at ~ 3044 cm −1 instigated by C-H stretching vibration with the medium appearance in the alkene compound class can be assigned to CH, CH 2 , and CH 3 groups with the sp 2 and sp 3 configurations where below 3000 cm −1 wave numbers, the smaller peaks correspond to the stretching (asymmetrical) in CH 2 with the sp 3 aliphatic configuration [58]. The absorption band at ~ 1605 cm −1 can be ascribed to the medium cyclic aromatic hydrocarbon group (alkene) with the ring vibration of carbon linear bonds (C=C) [58,59]. The intensity of this peak reduces with the time of thermal disengagement and the surrounding temperatures which signifies that the complete disintegration of polymeric bonds makes the separation of residues from the aluminum surface easier at higher treatment temperatures for a longer time.…”

Structure and tribological properties of Si/a-C:H(Ag) multilayer film in stimulated body fluid*

“…The absorption peak at 875 cm −1 is assigned to C-O stretching bond and the peaks appearing at 1000 cm −1 -1100 cm −1 belong to the -C-O-C-groups. [24] The absorption peaks in a range from 2700 cm −1 to 3100 cm −1 are caused by C-H stretching in CH, CH 2 , and CH 3 groups, [25] indicating H mainly bonded with sp 3 C in the film. The two peaks located at 2877 cm −1 and 2958 cm −1 are corresponding to the symmetric stretching vibration of sp 3 CH 3 , and the peak located at 2922 cm −1 is assigned to the symmetric stretching vibration of sp 3 CH 2 .…”

Deposition of Ag/a-C:H nanocomposite films with Ag surface enrichment

“…Therefore in our previous work, we decided to grow hydrocarbon plasma polymer matrix under positive ion bombardment that result in growth of hard plasma polymer (C:H) or even amorphous hydrogenated carbon (a‐C:H) . Copper nanoparticles were in this study simultaneously delivered from the GAS in contrary to usual preparation technique based on metal magnetron sputtering combined with plasma polymerization (PECVD) of a hydrocarbon gas added to the working gas argon . This allowed to have independent flux of Cu NPs and growth of the matrix.…”