Abstract:GaN thin films have been deposited on Si (111) substrates by pulsed laser deposition (PLD) of a GaN target in nitrogen atmosphere. An Nd: YAG pulsed laser with a wavelength of 1064 nm was used as a laser source. The results indicate that the GaN thin films deposited only by PLD are amorphous. By annealing in an NH3 atmosphere, the quality of the GaN thin films is improved, and the crystallzinity GaN thin films were obtained. The influence of annealing temperature on the crystallinity, structure, surface morpho… Show more
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