Effect of Annealing on Stress, Microstructure, and Interfaces of NiV/B4C Multilayers
Chenyuan Chang,
Zhenbo Wei,
Hui Jiang
et al.
Abstract:The functionality and reliability of nanoscale multilayer devices and components are influenced by changes in stress and microstructure throughout fabrication, processing, and operation. NiV/B4C multilayers with a d-spacing of 3 nm were prepared by magnetron sputtering, and two groups of annealing experiments were performed. The stress, microstructure, and interface changes in NiV/B4C after annealing were investigated by grazing-incidence X-ray reflectometry (GIXR), grazing-incidence X-ray diffraction (GIXRD),… Show more
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