2009
DOI: 10.1002/pssa.200881781
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Effect of annealing on electrical, structural, and optical properties of sol–gel ITO thin films

Abstract: Indium tin oxide (ITO) thin films (In/Sn = 90:10) prepared by the sol-gel dip-coating process on glass substrates, followed by annealing in air in the temperature range 150-550 • C were studied. Overall the films structure, surface roughness, and electrical performances are improved, leading to electrical resistivity fifth order of magnitude larger than before annealing and a more compact and crystalline films, translated by a preferential orientation in the (111) direction. Besides that, the films are highly … Show more

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Cited by 34 publications
(13 citation statements)
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“…Some grains which were not found before heat treatment are found at the surface, indicating that heat treatment induced crystallization of sol-gel ITO. 20 Peak shifting was not observed even after adding GO or rGO into the ITO matrix. 4.…”
Section: Resultsmentioning
confidence: 99%
“…Some grains which were not found before heat treatment are found at the surface, indicating that heat treatment induced crystallization of sol-gel ITO. 20 Peak shifting was not observed even after adding GO or rGO into the ITO matrix. 4.…”
Section: Resultsmentioning
confidence: 99%
“…6 Most TCOs require a heat treatment exceeding 300 °C to attain low resistivity and high transmission in the visible region. 7,8 The strengthening of electrical characteristics of ITO thin films by heat treatment is attributed to the elimination of localized electron traps via crystallization as well as an enhancement in charge-carrier concentration. 7 The increase in optical transmittance of the ITO thin films by heat treatment can be attributed to the increase in structural homogeneity and crystallinity.…”
Section: Introductionmentioning
confidence: 99%
“…7 The increase in optical transmittance of the ITO thin films by heat treatment can be attributed to the increase in structural homogeneity and crystallinity. 8 This high-temperature necessity can degrade the performance of organic devices and ARTICLE avs.scitation.org/journal/jvb deform plastic substrates. 6,9,10 Multilayer TCOs have been studied extensively in recent decades as one of the promising candidates to overcome such issues.…”
Section: Introductionmentioning
confidence: 99%
“…TCFs possess both optical transparency and good electrical conductivity; hence, they have recently emerged as important materials in the optoelectronic field. Many types of TCFs exist nowadays; however, fluorine tin oxide (FTO) and indium tin oxide (ITO) have been the most commonly used, due to their high transparencies, electrical conductivities, and chemical stabilities [7][8][9][10][11][12]. Unfortunately, TCFs based on ITO have a relatively high cost (indium is a rare-earth resource), and TCFs based on FTO have structural defects (e.g., voids forming between the film and its substrate during deposition) that decrease their electrical conductivity.…”
Section: Introductionmentioning
confidence: 99%