Effect of Anisotropic Incidence and Atomic Arrangement of CoFe System Magnetic Thin Films for the GHz Frequency in the Carousel Sputtering Method

Imaizumi, R.; Munakata, Mitsuru; Ohkoshi, M.; Maki, K.

doi:10.1541/ieejfms.131.499

IEEJ Trans. FM

2011

DOI: 10.1541/ieejfms.131.499

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Effect of Anisotropic Incidence and Atomic Arrangement of CoFe System Magnetic Thin Films for the GHz Frequency in the Carousel Sputtering Method

R. Imaizumi

Mitsuru Munakata

M. Ohkoshi³

et al.

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Effect of Anisotropic Incidence and Atomic Arrangement of CoFe System Magnetic Thin Films for the GHz Frequency in the Carousel Sputtering Method

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References 11 publications

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