“…The crystal orientation of the Co-Pt-Cr-SiO 2 film and the Ru underlayer on the Ta pre-coat layer was better than those on the Pt pre-coat layer. The difference in the surface energy of Pt and Ta is considered as a factor of this phenomenon [7]. Ta pre-coat layer, which has the surface free energy with a smaller difference to the Ru underlayer than that of the Pt pre-coat layer, brought about a good crystal orientation of the Ru underlayer.…”