Effect of AlN Interlayer Thickness on 2DEG Parameters in AlGaN/AlN/GaN HEMT Structures

Bashkatov, Dmitriy D.; Malin, Timur V.; Mansurov, Vladimir G.; Protasov, Dmitry Yu.; Milakhin, Denis S.; Zhuravlev, Konstantin S.

doi:10.1109/edm61683.2024.10615105

2024 IEEE 25th International Conference of Young Professionals in Electron Devices and Materials (EDM) 2024

DOI: 10.1109/edm61683.2024.10615105

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Effect of AlN Interlayer Thickness on 2DEG Parameters in AlGaN/AlN/GaN HEMT Structures

Dmitriy D. Bashkatov,

Timur V. Malin,

Vladimir G. Mansurov

et al.

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Effect of AlN Interlayer Thickness on 2DEG Parameters in AlGaN/AlN/GaN HEMT Structures

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References 28 publications

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