The structural, magnetic, and electrical properties of Co 2 MnSi ͑CMS͒/MgO ͑0 -3.0 nm͒ / n-GaAs tunnel junctions were investigated. CMS films with L2 1 -ordered structures were grown epitaxially on GaAs. The crystallographic relations were CMS͑001͓͒100͔ ʈ GaAs͑001͓͒110͔ when a thin MgO interlayer was inserted between the CMS and the GaAs, and CMS͑001͓͒110͔ ʈ GaAs͑001͓͒110͔ when the CMS film was directly grown on GaAs without a MgO interlayer. The CMS film without a MgO interlayer showed strong magnetic anisotropy consisting of uniaxial anisotropy with an easy axis of CMS͓1−10͔ ͑GaAs͓1−10͔͒ direction and cubic anisotropy with easy axes of CMS͗110͘ directions. The uniaxial anisotropy was weakened in the samples with a MgO interlayer. The magnetization value of the CMS film with a 3.0-nm-thick MgO layer was approximately 820 emu/ cm 3 ͑3.9 B / f.u.͒ at room temperature ͑RT͒, a value slightly higher ͑ϳ7%͒ than that of the sample without MgO. The resistance value of the CMS/MgO ͑3.0 nm͒ / n-GaAs junction was approximately two to three orders of magnitude higher than that of the CMS/ n-GaAs junction at RT. The potential height and width of the tunnel barrier in the CMS/ MgO / n-GaAs junction were estimated to be 0.6 eV and 3.3 nm, respectively.