Effect of a metal–dielectric structure introduced in the plasma chamber of the Frankfurt 14 GHz electron cyclotron resonance ion source

Abstract

Articles you may be interested inRole of a metal-dielectric structure for the high-charge-state-ion production in electron cyclotron resonance ion sources Rev. Sci. Instrum. 73, 4172 (2002); 10.1063/1.1519937Influence of the secondary electrons emitted by a cylindrical metal-dielectric structure on the Frankfurt 14 GHz electron cyclotron resonance ion source performances Rev. Sci. Instrum. 71, 918 (2000)

The influence of ambipolarity on plasma confinement and on the performance of electron cyclotron resonance ion sources

“…Having a dielectric layer formed on the inner surface of an aluminum cylinder ͑MD liner͒ which covers essentially the radial walls of the plasma chamber leads to an increase of the very high charge states of more than one order of magnitude. 4 The physics behind this effect is still not clear. The cylinder, which in the presence of a sufficiently strong electric field, on the structure, across the very thin dielectric layer is a strong emitter of electrons into the plasma, is at the same time a perfect insulator for currents from the plasma to the plasma chamber walls.…”

The impact of plasma-wall interaction on the gas mixing efficiency in electron cyclotron resonance ion source

“…We use the technique to insert metal-dielectric (MD) liners into the plasma chamber, which was elaborated by our team as another means to strongly increase the output from an ECRIS. 6 In the present work, however, the liner is used to change the plasma wall interaction in a controlled manner. …”

The effect of plasma electrode collar structure on the performance of the JYFL 14GHz electron cyclotron resonance ion source

“…Numerous techniques have been developed to improve the performance of ECR ion sources. These include the use of a negatively biased disk at the injection end of the plasma chamber [2][3][4], the gas mixing technique in which lighter gas is introduced into the plasma to boost the production of the high charge states of the heavier element [5,6], the use of two (or multiple) microwave frequencies to produce additional resonance surfaces [7][8][9][10], the introduction of metal-dielectric (MD) surfaces with high secondary electron emission coefficients into the plasma chamber [11,12] and, more recently, the fine tuning of the heating microwave frequency [13][14][15][16][17].…”