Efect of the membrane thermodeflection on the accuracy of a tensoresistive pressure sensor

Study of the influence of a fast­changing temperature on metrological characteristics of the tensoresistive pressure sensor

“…Under the action of the most fast-changing temperature, a thermal impact, the non-stationary temperature field in the membrane is described by equation [12] (1)…”

“…where λ m is the coefficient of linear thermal expansion of membrane's material. On the other hand, it is known [12] that the temperature difference for thickness, varying along the membrane's radius, will lead to a thermal deflection.…”

“…As it is known [12], at a given thermal deflection the values of relative deformations on the surface of the membrane can reach the level of working deformations of tensoresistors located on the membrane. This means that this very component of possible thermal deformation of the membrane will lead to a temperature error, which can approach a hundred percent.…”

“…Because the membrane is rigidly fixed in a massive casing, it cannot deform in its plane to a specific moment in time. Thus, in (9) and (10), , Equivalent to thermal stresses (12), the radial efforts in the plane of the membrane will be equal to…”