Edge-placement accuracy of opaque and clear defect repairs using focused ion beam technology

Raphaelian, M. L. A.; Carolan, D.; Casey, J. A.; Doyle, Andrew F.; Ellis, M.; Ferranti, David C.; Lessing, Joshua; Rose, Karen; Stewart, Diane K.; White, Roy L.

doi:10.1117/12.301220

SPIE Proceedings

1997

DOI: 10.1117/12.301220

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Edge-placement accuracy of opaque and clear defect repairs using focused ion beam technology

M. L. A. Raphaelian¹,

D. Carolan²,

J. A. Casey³

et al.

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Edge-placement accuracy of opaque and clear defect repairs using focused ion beam technology

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