Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification

Yang, Zhiliang; An, Kang; Liu, Yuchen; Guo, Zhijian; Shao, Siwu; Liu, Jinlong; Wei, Junjun; Chen, Liangxian; Wu, Lishu; Li, Chengming

doi:10.1007/s12613-024-2834-7

Int J Miner Metall Mater

2024

DOI: 10.1007/s12613-024-2834-7

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Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification

Zhiliang Yang,

Kang An,

Yuchen Liu

et al.

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Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification

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References 43 publications

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