Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017) 2017
DOI: 10.2991/eia-17.2017.16
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Economic Value of Using CrWN Films and the Contribution of Using Control Chart for Process Stability

Abstract: Abstract-This study investigates the optimization of direct current reactive co-sputter deposition process parameters to achieve multiple performance characteristics (roughness, roundness, and flank wear) in the CrWN thin films by the Grey-Taguchi method. In the confirmation runs, when using grey relational analysis, improvement of 17.045% was obtained in surface roughness, 20.833% in roundness, and 28.354% in flank wear, respectively. Furthermore, control charts tell us when special causes of variation are im… Show more

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