2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573)
DOI: 10.1109/csics.2004.1392507
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E-/D-pHEMT technology for wireless components

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Cited by 12 publications
(3 citation statements)
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“…The IP3 optimized design was fabricated using Triquint's 0.5um ED PHEMT process [6]. The process features e-mode PHEMTs with an fT ~ 30 GHz and a Vpo ~ 350mV.…”
Section: Fabrication and Resultsmentioning
confidence: 99%
“…The IP3 optimized design was fabricated using Triquint's 0.5um ED PHEMT process [6]. The process features e-mode PHEMTs with an fT ~ 30 GHz and a Vpo ~ 350mV.…”
Section: Fabrication and Resultsmentioning
confidence: 99%
“…The E/D pHEMT device topology and fabrication process are detailed in some earlier publications. [1][2][3] Other advantages of using E/D mode pHEMT process are the high level of RF circuit integration where a PA, LNA and switch can be easily integrated on the same die. The availability of smaller E mode devices for ESD protection circuitry can reduce the overall die size while providing high protection against ESD damage.…”
Section: E/d-mode Phemt Processmentioning
confidence: 99%
“…Long term reliability, RF power degradation and general lifetime requirements are not well understood for RF MEMS switches. These factors, coupled with the relatively low cost and high process maturity of solid state FET switches, processed in either GaAs [4] or silicon-on-sapphire (SOS) [5] technology solutions, have essentially kept RF MEMS switches from having any significant participation in large-scale commercial applications. In particular, the cellular handset puts an even higher constraint on RF switching solutions utilizing MEMS due to high volume, large number of switching events, and typically low profit margin requirements of any of its RF chain components.…”
Section: Introduction Mems Switch Requirements For Wireless Applicationsmentioning
confidence: 99%