Abstract:EUV lithography has been investigated as one of the next generation lithography technologies for sub-20 nm patterning because of its high resolution capability. However, outgassing from EUV resists should be improved in order to prevent optic contamination and to implement EUV lithography for high-volume manufacturing. Recently, in e-beam lithography for fabrication of photomask, the resist related outgassing has been also considered as one of the critical issues like that of EUV resists. E-beam exposure dose … Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.