Dynamics partial pressure gassing during pumping Wed

Abstract

DYNAMICS PARTIAL PRESSURE GASSING DURING PUMPING WEDThe partial gas release during pumping is considered as a weakly nonequilibrium process and describes the methods of linear nonequilibrium thermodynamics. Streams are linear functions of thermodynamic forces. Force is the relationship of affinity reactions to the gassing temperature parts. As the flows accepted flows constituting the gas phase. The coefficients of proportionality determined from the kinetic of the processes of adsorption, desorption and diffusion. Mutual influence of the electrodes (the transfer of impurities) is taken into account cross-coefficients.978-1-4244-6955-0/10/$26.00 ©2010 IEEE