“…In these studies, an added problem is that the role of the oxygen electronic state, O( 3 P), ground state, and O( 1 D), excited state, reactions with silane is not clear at this moment, 20 and very few dynamics studies have been reported, either experimentally 5,6,20 or theoretically. 15,21 From previous literature [5][6][7]15,20,21 there is a consensus that while the O( 1 D) + SiH 4 -Products reaction evolves through an insertion/addition mechanism with a very stabilized complex in the entrance channel and a barrierless process, the O( 3 P) + SiH 4 -Products reaction evolves through a direct hydrogen abstraction reaction with a noticeable barrier height. The rate constants for the O( 1 D) + SiH 4 reaction, then, are significantly higher than for the O( 3 P) + SiH 4 reaction.…”