Abstract:Abstract. The static and the dynamic behaviours of a MEMS subjected to thermoelastic and squeeze film effects have been investigated. Major attention is initially devoted to the modeling of this multi-physics system, including mechanical, electrical, thermoelastic and fluid dynamics behaviours, and their couplings. Then, static solutions have been obtained numerically by a finite-difference technique. Finally, an analysis of the vibrations is performed, and the complex natural frequencies are determined. The r… Show more
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