“…There have been various methods, such as in situ experiment, X-ray diffraction, Raman spectroscopy, and transmission electron microscopy (TEM), to explore the abrasive wear behavior, especially for the three-body abrasion of silicon materials [4,[11][12][13][14][15]. Oliver [16] evaluated various combinations of component factors, such as the size of abrasive particles, type of workpiece, and additives, based on CMP results.…”