The Be-based materials with many particular properties lead to an important research subject. The investigation progresses in the fabrication technologies are introduced here, including main three kinds of Be-based materials, such as Be-Cu capsule, Be 2 C ablator and high-purity Be material. Compared with the pioneer workgroup on Be-based materials, the differences in Be-Cu target fabrication were described, and a grain refinement technique by an active hydrogen reaction for Be coating was proposed uniquely. Be 2 C coatings were first prepared by the DC reactive magnetron sputtering with a high deposition rate (∼300 nm/h). Pure polycrystalline Be 2 C films with uniform microstructures, smooth surface, high density (∼2.2 g · cm 3 ) and good optical transparency were fabricated. In addition, the high-purity Be materials with metal impurities in a ppm magnitude were fabricated by the pyrolysis of organometallic Be.