Dynamic Response of an Electrostatically Actuated Micro-Beam in an Incompressible Viscous Fluid Cavity

Golzar, Farzin Ghahramanian; Shabani, Rasoul; Hatami, Hamed; Rezazadeh, Ghader

doi:10.1109/jmems.2013.2291037

Cited by 14 publications

(7 citation statements)

References 28 publications

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“…Borcia et al (2018) Considered the liquid pumping caused by oscillation of the elastic beam and applied lubrication theory to implementing this issue. Shabani et al (2013) And Golzar et al (2013) analytically presented free and forced vibration of micro-cantilever beam submerged in a confined liquid container with a fixed boundary approach. They assumed that the interaction of beam-fluid has fixed height along the length of the beam.…”

Section: Introductionmentioning

confidence: 99%

Analyzing free vibration of a beam-type liquid micro-pump with free boundary approach

Hatami

Bagheri

Ansari

2022

Journal of Vibration and Control

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The purpose of this article is the comprehensive analysis of free vibration of beam-type liquid micro-pump with a free boundary approach. Besides the liquid loading on the micro-beam, the kinematic compatibility between liquid and micro-beam is modeled according to the free boundaries. Galerkin and separation of variables methods are employed to solve these equations. Based on the nonlinear nature of the equations, the Newmark method is applied to obtain the normal frequencies, mode shapes, and the fluid oscillation of the coupled system. The aim of this model is to achieve the exact results for the small oscillations of micro-beam in the liquid container. Comparing the free and fixed boundary method reveals that for small oscillation of Euler–Bernoulli micro-beam, there is a slight deviation on the natural frequency, which can be negligible.

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Section: Introductionmentioning

confidence: 99%

Analyzing free vibration of a beam-type liquid micro-pump with free boundary approach

Hatami

Bagheri

Ansari

2022

Journal of Vibration and Control

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“…Based on FourierBessel series expansion and linear potential theory, Shabani et al [6] proposed an analytical model to investigate the free vibrations of a cantilever microbeam submerged in fluid, demonstrating that the fluid influenced the higher modes more effectively than the lower modes. Golzar et al [7] studied the dynamic instability of cantilever microbeam submerged in incompressible viscous fluid, and pull-in conditions of the beam were studied. Baroudi et al [8] developed an analytical model to study the added mass and mode shapes of a fixedfixed beam carrying concentrated masses submerged in fluid, in which the beam was modeled using the Bernoulli-Euler equation, and the fluid was modeled using the acoustic equation.…”

Section: Introductionmentioning

confidence: 99%

Effects of Time-Varying Fluid on Dynamical Characteristics of Cantilever Beams: Numerical Simulations and Experimental Measurements

Shao

et al. 2020

Mathematical Problems in Engineering

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In order to obtain the effects of time-varying fluid on dynamical characteristics of cantilever beams, this paper gives a comprehensive study of cantilever beams vibrating in a fluid with variable depth. The mathematical model of the cantilever beams in time-varying fluid is derived by combining Euler–Bernoulli beam theory and velocity potential theory, and the influence of the time-varying fluid is discussed. Then, a two-way fluid-structure interaction (FSI) numerical simulation procedure is proposed to calculate the transient responses of the beam. The validity and accuracy are verified according to the comparison among theoretical analysis, numerical simulations, and experimental measurements. Results show that, besides the added mass effect, a damping-like term is also induced due to the motion of the fluid, which is proportional to the moving velocity of the fluid. Both the added mass and the added damping increase with the increment of the width of the beam. The surrounding fluid near the free end affects the beam more significantly. As a negative damping is caused while the fluid decreases, resulting in a much slower decay of the time responses. Therefore, the added damping should not be neglected in the analysis of the FSI problems with time-varying fluid.

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“…Moeenfard and Maleki 19 presented a new approach based on extended Kantorovich method to simulate the static response of microplates for electrostatic actuation. Rezazadeh et al 20 and Golzar et al 21 demonstrated static and dynamic behaviors of fixedfixed and cantilever microbeams under electrostatic actuation using Galerkin-based reduced-order model while Golzar et al 21 considered the equivalent squeeze film damping in the governing equation as the microbeam is submerged in an incompressible viscous fluid cavity. Effect of piezoelectric effect on the static pull-in phenomenon of a microbeam under electrostatic actuation has been investigated in Chen et al 22 Azimloo et al 23 showed the influence of centrifugal forces on the stability of an electrostatically actuated clamped-clamped microbeam.…”

Section: Introductionmentioning

confidence: 99%

“…20 and Golzar et al. 21 demonstrated static and dynamic behaviors of fixed–fixed and cantilever microbeams under electrostatic actuation using Galerkin-based reduced-order model while Golzar et al. 21 considered the equivalent squeeze film damping in the governing equation as the microbeam is submerged in an incompressible viscous fluid cavity.…”

Section: Introductionmentioning

confidence: 99%

“…21 demonstrated static and dynamic behaviors of fixed–fixed and cantilever microbeams under electrostatic actuation using Galerkin-based reduced-order model while Golzar et al. 21 considered the equivalent squeeze film damping in the governing equation as the microbeam is submerged in an incompressible viscous fluid cavity. Effect of piezoelectric effect on the static pull-in phenomenon of a microbeam under electrostatic actuation has been investigated in Chen et al.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Electrostatic pull-in analysis of a nonuniform micro-resonator undergoing large elastic deflection

Prasanth

Harsha

Pratiher

2017

Proceedings of the Institution of Mechanical Engineers, Part C:

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Pull-in analysis of an electrostatically actuated nonuniform micro-resonator under large elastic deflection has been investigated with a focus on qualitative analysis to understand the essence of nonuniform cross-section on the determination of pull-in voltage. Here, a microcantilever beam with nonuniform cross-section has been adopted to develop a mathematical model considering the important features such as structural nonlinearities, nonlinear electrostatic distribution, and linear viscous effect. The individual effect of each design variables on the diagnosis of the critical voltage and corresponding critical deflection due to pull-in has been graphically depicted. The results in the static condition have been verified with the findings obtained via COMSOL multi-physics software. Present result indicates that a nonuniform microbeam configuration strengthens the structural stability by switching the pull-in voltage up to a higher value. Similarly, stable pull-in deflection within the restriction of pull-in instability has been also augmented. In addition, it has been shown that the nonuniformity within the beam structure is highly sensitive to the nonlinear effects. Hence, outputs provide a useful insight of pull-in behavior and enable an understanding of safe and smooth operating range of microelectromechanical system devices.

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Dynamic Response of an Electrostatically Actuated Micro-Beam in an Incompressible Viscous Fluid Cavity

Cited by 14 publications

References 28 publications

Analyzing free vibration of a beam-type liquid micro-pump with free boundary approach

Analyzing free vibration of a beam-type liquid micro-pump with free boundary approach

Effects of Time-Varying Fluid on Dynamical Characteristics of Cantilever Beams: Numerical Simulations and Experimental Measurements

Electrostatic pull-in analysis of a nonuniform micro-resonator undergoing large elastic deflection

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