Abstract:A computer simulation model is presented for ion induced deposition and sputtering in two-dimensional topographic surfaces. The model combines dynamic Monte Carlo simulation of the collision cascade with surface topography simulation, which treats compositional changes self-consistently with the evolution of the surface. An application is presented: erosion and deposition of a ripple surface of carbon irradiated by tungsten ions. Due to the deposition of implanted particles and the redeposition of sputtered pa… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.