2022
DOI: 10.1109/tmech.2022.3169761
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Dynamic Design of a Novel High-Speed Piezoelectric Flow Control Valve Based on Compliant Mechanism

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Cited by 20 publications
(9 citation statements)
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“…During the last decades, they have been extensively investigated to substitute the conventional rigid mechanisms since they offer several benefits, including simplicity, fewer parts, precision, weight reduction, improved performance, and versatility [9]. They have been widely used in various applications, such as biomedical engineering [10,11], high-precision flow control valves [12,13], energy harvesting mechanisms [14], feed drive mechanisms [15], and equipment for VAMs. Piezoelectric actuators (PZTs) that could offer extremely precise displacement at tens of microns combined with CMs to transfer and amplify the original motion is a popular way to design non-resonant VAM equipment.…”
Section: Introductionmentioning
confidence: 99%
“…During the last decades, they have been extensively investigated to substitute the conventional rigid mechanisms since they offer several benefits, including simplicity, fewer parts, precision, weight reduction, improved performance, and versatility [9]. They have been widely used in various applications, such as biomedical engineering [10,11], high-precision flow control valves [12,13], energy harvesting mechanisms [14], feed drive mechanisms [15], and equipment for VAMs. Piezoelectric actuators (PZTs) that could offer extremely precise displacement at tens of microns combined with CMs to transfer and amplify the original motion is a popular way to design non-resonant VAM equipment.…”
Section: Introductionmentioning
confidence: 99%
“…Bu yöntem ile hareketin tanımlanan sürede, örneğin 1000 ms'de tamamlanması istenmektedir. Kapalı çevrim çalışan sistem zamanla değişen şartlara rağmen hareket zamanını sabit tutmaya çalışmaktadır [7][8][9][10].…”
Section: şEkil 8 Basınç Kontrol Devresiunclassified
“…Previous research on high-flow and fast-response valves has primarily focused on proportional/servo or HSV [15][16][17]. In recent years, there has also been significant progress in the field of pilot valves for HSV [18,19]. However, it is almost inevitable to have spool structures when controlling flow direction in hydraulic systems using proportional/servo valves [20].…”
Section: Introductionmentioning
confidence: 99%