Dynamic Correction of Higher-Order Deflection Aberrations in the Environmental SEM

Oral, Martin; Neděla, Vilém; Danilatos, G. D.

doi:10.1017/s1431927615013367

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Fig 1 Primary Electron Beam Passing Through a High-pressure1

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“…In construction of ESEM, it is necessary to choose properly previous conditions. The non-acceptance of the previous conditions has such an effect that the signal/noise ratio in the detected signal is less favorable, and the final effect may deteriorate the resolution of the microscope [4].…”

Section: Fig 1 Primary Electron Beam Passing Through a High-pressurementioning

confidence: 99%

Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM

Hlavatá

Maxa

Bílek

et al. 2017

AiMT

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The article deals with the effect of the critical flow, which is examined at pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. Problematics were solved using finite volume method by Ansys Fluent system.

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Section: Fig 1 Primary Electron Beam Passing Through a High-pressurementioning

confidence: 99%