“…Nowadays, extremely dense modules are fabricated in UTCS technology, which exploits the recent advances in wafer thinning, as well as in attachment, bonding, and interconnection. In UTCS systems, multiple silicon chips thinned down to 10 μm are vertically integrated on a single (inactive) host silicon substrate, being the electrical insulation among them ensured by layers of benzocyclobutene (BCB), a photosensitive polymer with good planarization properties [11], [12], [29], [30]; the resulting stack provides larger circuitry integration than in 2-D ICs. Unfortunately, UTCS architectures may be subject to exacerbated thermal effects dictated by (i) the high power density and (ii) the low thermal conductivity of BCB (about 800 times lower than that of silicon), which inhibits the downward heat propagation from the power-dissipating regions to the board [11], [12], [30].…”