Dynamic Behavior of T-beam Resonator With Repulsive Actuation

Abstract

We introduce a MEMS resonator that uses a "T"-shape beam driven by repulsive force, of which the first advantage is to avoid pull-in instability; thus, high enough voltages can be applied to the MEMS system to tune the center frequency. A T-beam model is derived from the beam-paddle hypothesis, and theoretical analysis regarding both static and dynamic behaviors, including primary resonance and secondary resonance, is conducted. This study shows an electrostatic T-beam resonator's feasibility based on repulsive force and outlines its advantages over a traditional cantilever beam resonator. Additional micro-paddle to the micro-beam means larger surface for absorption of targeted analytes and lower natural frequency, but higher resonant responses. We present a thorough analysis of primary and parametric resonances, which can enhance the system signal-to noise ratio and response time. This design enables potential applications in MEMS mass-sensors, where a large area for attachment and a high resolution are often vital.

A review on the nonlinear dynamics of hyperelastic structures

“…The structure was assumed to be sitting on a Pasternak-Winkler medium. Equations of motion were solved and obtained using Galerkin's scheme and Hamilton's principle (which have been used by researchers for studying elastic structures [102][103][104][105]), respectively; it was claimed that the shear strain effects were neglected in the Yeoh strain energy. In another study, Mirjavadi et al [106] used the Euler-Bernoulli beam assumptions showing that for hyperelastic tube models, by increasing the amplitude of vibration, since the effect of nonlinear terms in the structure modelling increases and due to different stress invariant considerations, the difference between the Yeoh and twoparameter Mooney-Rivlin results increased.…”