Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods

Teyssieux, Damien; Briand, D.; Charnay, J; Rooij, N. F. de; Cretin, B.

doi:10.1088/0960-1317/18/6/065005

Cited by 13 publications

(8 citation statements)

References 29 publications

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“…Since MEMS fabrication is usually carried out on silicon wafers, which require a lot of etching work, it is time consuming and costly [10]. Thin films like SiO 2 and Si 3 N 4 can only sustain small loads due to their poor mechanical strength, so the application of the heater based on these substrates is limited to some gas sensors and IR devices [11,12,13]. Recently however, polymer membranes, especially polyimide, have gained a lot of attention [14,15] due to their robustness, low thermal conductivity, and simple fabrication process.…”

Section: Introductionmentioning

confidence: 99%

A novel polyimide based micro heater with high temperature uniformity

Wang

et al. 2017

Sensors and Actuators A: Physical

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MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature-dependent measurements. In this paper we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as a simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. This design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving.

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Section: Introductionmentioning

confidence: 99%

A novel polyimide based micro heater with high temperature uniformity

Wang

et al. 2017

Sensors and Actuators A: Physical

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“…Combining Eqs. (2) and (3) then yields 31 However, the double scan technique only solves the first problem of conventional SThM, and cannot solve the remaining problems explained in the introduction. In order to solve the rest of these problems, Chung et al 36 noted that T j (= T c − T nc ), the temperature jump, is proportional to T s − T c , as shown in Eq.…”

Section: Spatial Resolution Of a Sthm Probe Based On A Rigorous Tmentioning

confidence: 99%

Enabling low-noise null-point scanning thermal microscopy by the optimization of scanning thermal microscope probe through a rigorous theory of quantitative measurement

Hwang

Chung

Kwon

2014

Review of Scientific Instruments

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The application of conventional scanning thermal microscopy (SThM) is severely limited by three major problems: (i) distortion of the measured signal due to heat transfer through the air, (ii) the unknown and variable value of the tip-sample thermal contact resistance, and (iii) perturbation of the sample temperature due to the heat flux through the tip-sample thermal contact. Recently, we proposed null-point scanning thermal microscopy (NP SThM) as a way of overcoming these problems in principle by tracking the thermal equilibrium between the end of the SThM tip and the sample surface. However, in order to obtain high spatial resolution, which is the primary motivation for SThM, NP SThM requires an extremely sensitive SThM probe that can trace the vanishingly small heat flux through the tip-sample nano-thermal contact. Herein, we derive a relation between the spatial resolution and the design parameters of a SThM probe, optimize the thermal and electrical design, and develop a batch-fabrication process. We also quantitatively demonstrate significantly improved sensitivity, lower measurement noise, and higher spatial resolution of the fabricated SThM probes. By utilizing the exceptional performance of these fabricated probes, we show that NP SThM can be used to obtain a quantitative temperature profile with nanoscale resolution independent of the changing tip-sample thermal contact resistance and without perturbation of the sample temperature or distortion due to the heat transfer through the air.

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“…To avoid these two main disadvantages of mid-wave infrared thermography, it is effective to operate in lower spectral range (near infrared spectral range). Teyssieux et al [18,19] proposed that the disturbance due to radiation from surrounding objects is low and can be negligible when the wavelength is less than 2 μm, while the disturbance radiation from surrounding objects is obvious when the wavelength is greater than 2 μm. Their study indicated that disturbance due to radiation from surrounding objects can be ignored using lower spectral range.…”

Section: Introductionmentioning

confidence: 99%

An innovative technique for real-time adjusting exposure time of silicon-based camera to get stable gray level images with temperature evolution

Zhang

Marty

Maynadier

et al. 2019

Mechanical Systems and Signal Processing

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Silicon-based sensor cameras are known to be sensitive in the near infrared spectral range, in which a small temperature variation leads to a large modification in the image gray level. It induces acquired images with local saturation or poor dynamic range of gray levels. In order to address this problem, the present study proposes an innovative technique to precisely and automatically adjust the exposure time to obtain stable gray level images when the temperature evolution occurs on the surface of the observed object. Two algorithms, including linear algorithm and Planck's algorithm, are proposed to predict the exposure time to obtain stable gray level images. Blackbody heating experiment is conducted to validate the accuracy of these two algorithms, and the result indicates that stable gray level images can be obtained using Planck's algorithm. Moreover, this technique is applied to the specimen heating experiment, and the stable gray level images can also be obtained using Planck's algorithm. These two experimental results prove that the technique is effective and reliable. Finally, the thermal fields are reconstructed on images of blackbody.

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Dynamic and static thermal study of micromachined heaters: the advantages of visible and near-infrared thermography compared to classical methods

Cited by 13 publications

References 29 publications

A novel polyimide based micro heater with high temperature uniformity

A novel polyimide based micro heater with high temperature uniformity

Enabling low-noise null-point scanning thermal microscopy by the optimization of scanning thermal microscope probe through a rigorous theory of quantitative measurement

An innovative technique for real-time adjusting exposure time of silicon-based camera to get stable gray level images with temperature evolution

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