Abstract:A new kind of fringing electrostatic actuation mode is developed. In this new actuation mode, the expression of fringing electrostatic force is found. The nonlinear dynamic analysis of this new actuation mode is presented by using the Method of Multiple Scales. An experiment is designed to observe the dynamic behaviors of this structure. It is observed that the resonance frequency rises with the increase of the initial displacement and the decrease of the slit gap; a smaller slit gap makes marked change of the… Show more
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