Dual mode acoustic wave sensor for precise pressure reading

A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing

“…Benefitting from the device design, the sensor reveals low temperature drift features. It is able to operate at temperature ranges from 20 • C to 220 • C with a first order temperature coefficient of frequency (TCF) of −14.4 ppm/ • C, which is only about half that in previously reported works [21,22]. We believe this work extends the capability boundary of MEMS pressure sensors.…”

“…However acoustic wave pressure sensors still suffer an unavoidable frequency shift vs. temperature, and this will result in inaccurate pressure readouts. Kropelnicki et al presented a dual mode acoustic wave pressure sensor to cancel the effect caused by temperature [21,22], at the cost of a complex readout circuit in actual work. Besides, such a sensor is designed for relative pressure measurements, not absolute pressure ones.This paper describes an aluminum nitride (AlN)-based acoustic wave absolute pressure sensor, containing an integrated vacuum cavity as pressure reference.…”

Millimeter-wave band-pass filter based on complementary split ring and SIW resonators

“…AM technology features smaller size, cost effectiveness, time efficiency, and increased environmental friendliness in comparison with conventional manufacturing methods. AM has been used for the implementation of 3D substrateintegrated waveguide components [1]. New 3D printing techniques utilizing direct printing of silver ink [2] onto the internal surfaces of a hemisphere substrate has been proposed in Ref.…”

“…They are seen in applications such as sensor systems, clock generations, and more. Compared with the surface acoustic wave resonators, Lamb wave resonators present a smaller size, lower fabrication cost, and much higher resonant frequency [1][2][3]. The advances in semiconductor fabrication technologies have aided the implementation of Lamb wave devices on silicon substrates, making the Lamb wave resonators attractive for System-on-Chip (SoC) applications.…”

“…Compared with the conventional resonators, Lamb wave resonators feature higher resonant frequencies, i.e. GHz, and smaller sizes [1][2][3][4][5]10]. However, as the resonant frequency escalates, several parasitic components manifest.…”