Abstract:Articles you may be interested inRipple formation on atomically flat cleaved Si surface with roughness of 0.038 nm rms by low-energy Ar 1 + ion bombardment J.Abstract. Morphological studies were done on Si (001) surfaces after rastering them with a 1 keV O 2 + Keywords: Sputtering, atomic force microscopy, morphology evolution ion beam at an angle. The resulting mounded morphology was studied using atomic force microscopy (AFM) measurements. The roughness at different length scales were further extracted and q… Show more
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